首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
图案形成方法及图案形成装置、以及元件制造方法
摘要
本发明，系在晶圆载台(WST)从将晶圆(W)搬入晶圆载台(WST)之装载位置、移动至对晶圆(W)开始曝光之曝光开始位置的期间，一边使对准系统(ALG1, ALG2)之至少一部分移动、一边使用该对准系统(ALG1, ALG2)检测晶圆(W)上之标记。如此，即能提升曝光制程整体之处理量。
申请公布号
TW200741813
申请公布日期
2007.11.01
申请号
TW095149426
申请日期
2006.12.28
申请人
尼康股份有限公司
发明人
柴崎佑一
分类号
H01L21/027(2006.01);G03F9/00(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
桂齐恒;阎启泰
主权项
地址
日本
您可能感兴趣的专利
Method of publishing a ticket on demand and apparatus thereof
Barrier film material and pattern formation method using the same
Parking assist apparatus
Method of fabricating a semiconductor package having through holes for molding back side of package
Systems and methods for controlling local oscillator feed-through
Rotary digging and compression enlarging driller and boring method
Apparatus for electromagnetically shielding a portion of a circuit board
Adaptive power control
Bayesian surety check to reduce false positives in filtering of content in non-trained languages
Semiconductor device and method for manufacturing the same
PUFA polyketide synthase systems and uses thereof
Method and system for internet transport acceleration without protocol offload
Method for monitoring an exhaust gas purifying component
Method of transmitting reference signal and transmitter using the same
Identifying a flow identification value mask based on a flow identification value of a packet
Methods for multi-wire routing and apparatus implementing same
Method and apparatus for a secure network install
Method and system for downloading data to mobile terminals and for implementing data sharing between mobile terminals
Method for generating intensive high-voltage pulses for industrial use and associated circuit
Synchronous updating of dynamic interactive applications
