| 摘要 |
PROBLEM TO BE SOLVED: To provide a new catalyst support type chemical machining method, machining a workpiece, especially Sic or GaN whose importance has been lately increased as material for electronic devices at high machining efficiency and with high accuracy extending over a spatial wavelength region of tens ofμm or more. SOLUTION: A workpiece is disposed in a solution of an oxidizer, a catalyst made of transition metal is brought into contact with the machined surface of the workpiece, or made to come very close thereto, thereby removing or eluting chemical compound generated by chemical interaction of an active species generated on the catalyst surface and having strong oxidizing force and the surface atom of the workpiece to machine the workpiece. The oxidizer is H2O2, the catalyst is Fe, the workpiece is SiC or GaN, and Fenton's reaction is utilized to perform machining. COPYRIGHT: (C)2008,JPO&INPIT
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