PROBE CARD AND GLASS SUBSTRATE DRILLING METHOD

摘要

[PROBLEMS] To form a guide hole so as to contain more probe pins than in the conventional method in the same region support plate of the probe card and improve the probe pin position accuracy and the guide hole position accuracy and dimension accuracy. [MEANS FOR SOLVING PROBLEMS] The support plate guide hole has a horizontal cross section of a rectangular shape. A plurality of grooves are arranged at the opposing side surfaces in the guide hole.The grooves are arranged to oppose each other and the region between the opposing grooves in the guide hole forms an insert section. A probe pin is inserted in each insert section. Since one guide hole has a plurality of insert sections for inserting the probe pin, it is possible to arrange more probe pins than in the conventional guide hole.