DROP COATING APPARATUS

摘要

Disclosed is a drop coating apparatus comprising a base (11) having a stage surface (11a) on which a substrate (10) is placed, an arm member (4) attached to the base (11) movably in the direction shown by the arrow A with respect to the base (11), a plurality of drop ejecting units (6) attached to the arm member (4) movably in the direction shown by the arrow B with respect to the base (11) for ejecting drops onto the substrate (10) placed on the stage surface (11a), an imaging unit (90) for detecting an alignment mark (110) of the substrate (10) placed on the stage surface (11a), and a posture adjusting unit (12) for adjusting the posture of the substrate (10) placed on the stage surface (11a) in accordance with the detection result of the imaging unit (90).