| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container that can safely and reliably separate a separator from a pellicle. <P>SOLUTION: A separator is fixed to a pellicle storage container tray by providing a protruding region having a plurality of through holes on the outer periphery of the separator and inserting a fixing tool having a portion with a larger diameter than the through hole into the through hole. It is preferable respectively that: a pellicle is fixed to the pellicle storage container tray by other means than the above separator fixing means; by the other means, the pellicle is fixed to the pellicle storage container tray by pins inserted to a plurality of non-penetrating holes provided in the side face of a pellicle frame; the fixing tool of the separator to the pellicle storage container can be attached and detached; the fixing tool of the separator is sucked and fixed to the pellicle storage container by magnetic force; at least one part in the fixing tool of the separator to the pellicle storage container is provided within 50 mm distance from a corner of the pellicle frame. <P>COPYRIGHT: (C)2008,JPO&INPIT |
