发明名称 CUTTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a cutting apparatus capable of reliably detecting the position of a cutting blade when the outer periphery of the cutting blade comes into contact with the upper surface of a chuck table and a work to be machined regardless of the cutting blade made of an insulator, such as a resin bonded abrasive tool blade. SOLUTION: The cutting apparatus comprises: the chuck table; a cutting means for cutting a work to be machined held by the chuck table, a cutting feed means for relatively moving the chuck table and the cutting means, and a cutting feed means for moving the cutting means vertically to the holding surface of the chuck table. The cutting means comprises: a rotary spindle, a cutting blade fitted to the rotary spindle, a drive means for rotating and driving the rotary spindle, and a spindle housing for rotatably supporting the rotary spindle. The cutting apparatus comprises: a vibration signal generation means for generating a vibration signal corresponding to vibration operating on the rotary spindle; and a control means for determining the state of the cutting blade, based on a vibration signal generated by the vibration signal generation means. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007287722(A) 申请公布日期 2007.11.01
申请号 JP20060109835 申请日期 2006.04.12
申请人 DISCO ABRASIVE SYST LTD 发明人 KUMAGAI SOSUKE
分类号 H01L21/301;B23Q17/12;B23Q17/22;B24B27/06;B24B47/22;B24B49/10 主分类号 H01L21/301
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