| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe for a scanning microscope, capable of performing fixing and cutting of a nanotube probe, and improving the material quality of the nanotube probe by injection of other types of atoms or the like. SOLUTION: The probe for scanning microscope by focused ion beam processing, for obtaining physical property information of a sample surface by a tip 14a of a nanotube probe 12 fixed to a cantilever 4, is configured to decompose an organic gas G by ion beam I in a focused ion beam device 2 and fix the nanotube 12 to the cantilever 4 by a deposit 18 of the decomposition components generated. In this probe, removal of unnecessary deposit 24 adhered to the nanotube tip 14, cut of an unnecessary portion of the nanotube to control the probe length, or refining of the nanotube probe by implanting ions to the nanotube tip 14, can be performed by the use of the focused ion beam I. COPYRIGHT: (C)2008,JPO&INPIT
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