Solid-State Actuator, Especially Piezoceramic Actuator

摘要

An embodiment of the invention relates to a solid-state actuator, especially a piezoceramic actuator, which comprises a support layer to which at least one actuator layer, especially a piezoceramic layer, is applied, the actuator layer being disposed between contact electrodes. In order to avoid a creep behaviour of the solid-state actuator, the resistivity of the actuator layer is rated between 110⁸ Omegam to 110¹⁰ Omegam and/or an actuator control device for applying a control voltage to the contact electrodes is provided and the maximum control voltage is selected in such a manner that the maximum mechanical voltage in the solid-state actuator is below the coercive voltage.