摘要 |
According to one aspect of the present invention, a passive substrate gripper, including first and second segments, is provided. The second segment may be connected to the first segment, and the first and second segments may jointly form a substrate support. The substrate support may be shaped to support a substrate in first position within the substrate support when the substrate support is in a first angular orientation. The substrate may be removable from substrate support in a first direction when in the first position. The substrate may move into a second position when the substrate support is moved into a second angular orientation. The substrate may not be removable in the first direction when in the second position within the substrate support. The passive substrate gripper may also include a support ledge extending from opposing inner surfaces of the first and second segments, on which the substrate is supported.
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申请人 |
APPLIED MATERIALS, INC.;WADENSWEILER, RALPH, M.;ENDO, RICK, R.;KO, ALEXANDER, S. |
发明人 |
WADENSWEILER, RALPH, M.;ENDO, RICK, R.;KO, ALEXANDER, S. |