| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive actuator which can be driven with a low voltage and has high reliability, and also a method of manufacturing the actuator. <P>SOLUTION: The method has: a first step of processing a substrate 5 to form a base substance 2, bringing the substrate 5 into contact with a support 3 in such a manner that a ferroelectric substance 32A made of mainly a ferroelectric material as its main material is located in a space (a recess 29), and heating the substrate 5 and the support 3 with an electric field applied thererto to join the substrate 5 to the support 3; and a second step of applying an electric field to the ferroelectric substance 32A for its polarization to obtain a piezoelectric material 32. <P>COPYRIGHT: (C)2008,JPO&INPIT |
