| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To inspect film thickness distribution and film quality of each of a plurality of stacked cell layers in a solar battery. <P>SOLUTION: A device for evaluating a photoelectric conversion layer includes an application part 3 for applying a first beam absorbed by an amorphous film and a second beam absorbed by a crystalline film to a thin film, a detection part 2 for receiving transmitted beams of the first and second beams transmitted by the thin film, and a control part 7 for calculating film thicknesses of amorphous film components and of crystalline film components in the thin film based on the transmitted beams of the first and second beams. Where a crystalline film is stacked on an amorphous film of a substrate 11, the application part 3 applies the first and second beams as first and second application beams to the crystalline film and the amorphous film, respectively. The detection part 2 receives the first and second transmitted beams of the first and second application beams, respectively. The control part 7 calculates the first film thickness of the amorphous film based on the first transmitted beam while calculating the second film thickness of the crystalline film based on the second transmitted beam. The control part 7 evaluates the film quality of the crystalline film based on the first and second film thicknesses, and on an original film thickness of the amorphous film prior to the formation of the crystalline film. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
