| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a production method for a composite oxide film having a high dielectric constant and whose film thickness can be optionally controlled without using complicated and large-scale equipment, to provide a composite body having the composite oxide film on the surface of a substrate, to provide a dielectric material or a piezoelectric material comprising the composite body, to provide a capacitor or a piezoelectric element comprising these materials, and to provide electronic apparatus provided with these elements. <P>SOLUTION: An oxide film on the surface of a substrate comprising a first metal element is removed, next, the substrate from which the oxide film is removed is brought into reaction with a solution comprising a basic compound to become into a gas by at least one means selected from evaporation, sublimation and thermal decomposition under the atmospheric pressure or reduced pressure and the ions of a second metal element, so as to obtain a composite oxide film comprising the first metal element and the second metal element on the surface of the substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
