| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of excellently irradiating a substrate with exposure light while placing a liquid in an immersed region in a desired state. <P>SOLUTION: The exposure device includes an immersion unit which forms an immersed region of liquid on a body disposed at a position which can be irradiated with the exposure light, and a first irradiation unit which irradiates the liquid with first light optically captures foreign matter in the liquid with light pressure of the first light. <P>COPYRIGHT: (C)2008,JPO&INPIT |
