| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor capable of vibration detection over a wide frequency range without need of regulating the vibration sensor by being matched with the frequency of vibration generated in an object to be detected, and to provide a vibration detection method. SOLUTION: The vibration sensor 1 comprises a plurality of vibration detection elements 10 differing a resonant frequency by differing a thickness of a vibration part 20 in each vibration detection element 10. A plurality of vibrations different in frequencies can be detected. Thereby, since the vibration of the wide frequency range can be detected, the vibration sensor 1 needs not be regulated by being matched with the frequency of knocking vibration in each kind of engines 50. In addition, the vibration of the frequency different from the knocking vibration can be detected. In addition, since each vibration part 20 and each transmission part 11a are formed on a semiconductor substrate 15, the vibration sensor 1 can be miniaturized. COPYRIGHT: (C)2008,JPO&INPIT
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