| 摘要 |
PROBLEM TO BE SOLVED: To provide a blasting method having a high selection ratio, high processing rate of a layer to be processed, and small amount of shift. SOLUTION: In the blasting method, a substrate or a laminate film to be laminated on the substrate is made to the layer to be processed, a resist layer is laminated on the processed surface so that the processed surface of the layer to be processed is partially exposed, and the layer to be processed is selectively processed by causing abrasive grains to collide with the side of the processed surface partially exposed by an air jet flow. The blasting method is characterized in that the abrasive grains are spherical or ellipsoidal. COPYRIGHT: (C)2008,JPO&INPIT
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