摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric single crystal composition which shows a high etching rate, has a large electromechanical coupling factor and is excellent in mass productivity. SOLUTION: The piezoelectric single crystal composition has a langasite structure and is represented by the chemical formula: (Sr<SB>1-x</SB>Ba<SB>x</SB>)<SB>3</SB>Ga<SB>2</SB>Ge<SB>4</SB>O<SB>14</SB>, wherein x satisfies the relation: 0<x≤1.0. Alternatively, the piezoelectric single crystal composition has a langasite structure and is represented by the chemical formula: (Sr<SB>1-x</SB>Ba<SB>x</SB>)<SB>3a</SB>Ga<SB>2b</SB>Ge<SB>4c</SB>O<SB>14</SB>, wherein x, a, b and c satisfy the relations: 0<x≤1.0, 0.95<a≤1.05, 0.90<b≤1.20 and 0.95<c≤1.30, respectively. COPYRIGHT: (C)2008,JPO&INPIT
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