| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an actuator suitable for an optical scanning actuator, dispensing with an SOI substrate so as to be inexpensive, having favorable handling performance in a manufacturing process, reducing the thickness of a movable part, and having a wide scanning range of a light beam. SOLUTION: A driving coil 5 is formed in a forming part of an actuator part 1 in a silicon substrate, and after the driving coil 5 is formed, a support member for forming a support part 10 supporting the actuator part 1 is joined to a silicon substrate surface on the same side as the driving coil 5, and the silicon substrate surface on the opposite side to the support member joined surface is ground to a desired thickness to set the thickness of the actuator part 1. After grinding, beam parts 3, 3 and a movable part 4 are formed in the actuator part forming region by etching, and then a reflection mirror is formed on the back of the movable part 4 to form a chip. COPYRIGHT: (C)2008,JPO&INPIT
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