发明名称 Method for fabricating CMOS image sensor with plasma damage-free photodiode
摘要 A method for fabricating a complementary metal-oxide semiconductor (CMOS) image sensor includes providing a semi-finished substrate, forming a patterned blocking layer over a photodiode region of the substrate, implanting impurities on regions other than the photodiode region using a mask while the patterned blocking layer remains, and removing the mask.
申请公布号 US2007254424(A1) 申请公布日期 2007.11.01
申请号 US20070727750 申请日期 2007.03.28
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 CHA HAN-SEOB
分类号 H01L21/8234 主分类号 H01L21/8234
代理机构 代理人
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