| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card which is efficient in measuring a peripheral portion of a semiconductor wafer, and to provide a measuring method using this probe card. SOLUTION: The probe card 11 has a region equipped with a plurality of probes corresponding to individual chips, and this region is divided into a plurality of regions. A test signal is switched over between a pair of divided regions, and the test signal is supplied only to one region of the pair of regions. Thus, by switching over a region to be measured by the probe card 11 in conformity with the arrangement of chips of the semiconductor wafer by switching over the test signal, there is no need of measuring a peripheral portion of the semiconductor wafer having no chips, which improves the measuring efficiency. COPYRIGHT: (C)2008,JPO&INPIT
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