发明名称 MOS CAPACITOR AND METHOD OF MANUFACTURING THE SAME
摘要 A MOS capacitor and a method for manufacturing the same are provided to form a high-density and high-capacity semiconductor memory by minimizing an area of a memory array. A first region(10) is formed on a predetermined position of a semiconductor substrate(1) and includes an insulator with a predetermined thickness inserted into a depth direction of the semiconductor substrate. A second region(20) is formed in an edge of the first region. A MOS capacitor dielectric layer is formed along an internal edge of the second region and on a silicon surface of a periphery of the second region. A MOS capacitor region(50) is formed along the MOS capacitor dielectric layer. A MOS capacitor electrode(60) is formed on the MOS capacitor dielectric layer and is extended to the MOS capacitor region.
申请公布号 KR20070105710(A) 申请公布日期 2007.10.31
申请号 KR20060038244 申请日期 2006.04.27
申请人 YOUN, UK HYUN 发明人 YOUN, UK HYUN
分类号 H01L27/092;H01L21/335 主分类号 H01L27/092
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