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发明名称
CHARGED-PARTICLE EXPOSURE APPARATUS
摘要
申请公布号
EP1849175(A2)
申请公布日期
2007.10.31
申请号
EP20060704702
申请日期
2006.02.16
申请人
IMS NANOFABRICATION AG
发明人
STENGL, GERHARD;PLATZGUMMER, ELMAR;CERNUSCA, STEFAN
分类号
H01J37/317
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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