| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-pressure processing device for preventing a turbulent flow from occurring in a chamber in low-pressure processing. SOLUTION: In the low-pressure processing device 1, there are a number of outlets 411, 421, 431 on the entire upper surface of a housing 32. The outlets 411, 421, 431 are connected to exhaust pipes 412, 422, 432 each. The suction means of the low-pressure processing device 1 has a throttle and a pressure reducing pump. The suction means sucks air in the chamber 3 via respective exhaust pipes 412, 422, 432 for reducing pressure in the chamber 3, and the suction force of air is set equally in respective exhaust pipes 412, 422, 432. COPYRIGHT: (C)2008,JPO&INPIT
|
