| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection method capable of precisely detecting projections on a substrate when manufacturing PDP. SOLUTION: A defect inspection device 21 comprises a stage 22 on which a substrate is placed, and a detecting device equipped with a laser radiation device 23 which radiates laser beam parallel to the upper surface of the stage 22, and a light receiving device 24 for receiving laser beam. In step 1, a PDP substrate 20 where a dielectric layer is formed on the substrate is placed on the stage 22. The laser beam is radiated from the laser radiation device 23, and at least the PDP substrate 20 or detecting device is moved so that the PDP substrate 20 passes between the laser radiation device 23 and the light receiving device 24, for receiving the laser beam with the light receiving device 24. The size of a projection is acquired based on the change in signal level when receiving the beam. In step 2, soundness is judged based on the size of the projection. COPYRIGHT: (C)2008,JPO&INPIT
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