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经营范围
发明名称
HOHLSPINDEL UND SCHLEUDER-, SPÜL- UND TROCKENVORRICHTUNG MIT EINER DERARTIGEN SPINDEL
摘要
申请公布号
DE60036407(D1)
申请公布日期
2007.10.25
申请号
DE2000636407
申请日期
2000.12.19
申请人
LAM RESEARCH CORP.
发明人
PASCAL, ROY WINSTON
分类号
H01L21/00;H01L21/683;H01L21/304
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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