| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning device capable of nicely removing the affection of disturbance, and a lithography device equipped with the positioning device. <P>SOLUTION: In the control method of the positioning device the positioning device is provided with a stator, a mover movable with respect to the stator, a positioning sensor for producing a positional signal showing the position of the mover with respect to the stator, and a controller which receives the positional signal and obtains an error signal by comparing the positional signal with a setting point signal to produce at least one mover control signal, based on at least one signal component of the positional signal while the controller is provided with a variable gain VGE (variable gain element). The positioning device, comprising the position sensor and the controller, defines a control loop. With respect to the error signal having a magnitude within a previously defined range, a gain is selectively set at a value, higher than a value for the error signal having a magnitude without the previously defined range. <P>COPYRIGHT: (C)2008,JPO&INPIT |
