| 摘要 |
PROBLEM TO BE SOLVED: To measure the temperature in the inside of a heating plate 2, using a radiation thermometer 5, even when the heating plate 2 is concealed behind a base plate, a susceptor or a heat-shielding plate. SOLUTION: This instrument for measuring the temperature of the heating plate 2 is provided with a hole 7 in the heating plate 2, is arranged with a plug 4 in the hole 7, and measures radiation heat from the plug 4 through the hole 7 by the radiation thermometer 5. The accurate temperature is measured, regardless of the emissivity of the heating plate 2, by using a plug, comprising graphite having the emissivity near to 1.0 as the plug 4. The temperature can be measured without being disturbed by the base plate or the susceptor, by opening the hole 7 on a sideface of the heating plate 2, even if the base plate or the susceptor is mounted on the heating plate 2. The temperature distribution of the heating plates 2 is acquired effectively by arranging the plurality of plugs 4 at different positions of the heating plate 2 to measure the temperatures. COPYRIGHT: (C)2008,JPO&INPIT |
