PROCESSING APPARATUS AND MEHTOD OF USING ULTRASHORT PULSE LASER

摘要

A method and an apparatus for processing an ultrashort pulse laser are provided to minimize a Moir pattern, which is generated in a single pulse process, by adjusting polarization properties of split pulses. An apparatus for processing an ultrashort pulse laser includes a laser generator(1), a laser splitter(10), a path coupler(27), and a process unit(40). The laser generator generates a laser pulse. The laser splitter splits the laser and applies the split lasers into different paths. The path coupler couples the paths for the lasers from the laser splitter. The process unit processes an object by using the coupled laser. The laser splitter includes a beam splitter(11), a polarization adjuster(14), a polarization plate(15), and a transfer member(20). The polarization plate adjusts an output of the split laser. The transfer member adjusts a path for the split laser.