| 摘要 |
<P>PROBLEM TO BE SOLVED: To ensure the radiation route of a resonator element to improve the radiation characteristic of the resonator element. <P>SOLUTION: The resonator 1 has a first electrode 13 which periphery is supported on a substrate 11 via a space 12, a piezoelectric film 14 formed on the first electrode 13 above the space 12, and a second electrode 15 formed over the space 12 on the piezoelectric film 14. A radiator 18 is provided in the center of the space 12 for radiating heat generated in a resonator element 16 of the first and second electrodes 13, 15 and the piezoelectric film 14 toward the substrate 11. <P>COPYRIGHT: (C)2008,JPO&INPIT |
