| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment/separation unit which shortens a time required for aligning laser device wafer bars and spacers alternately on a thin film treatment holder or separating them. SOLUTION: This unit comprises: a thin film treatment holder for aligning laser device wafer bars and spacers; a spacer tray for placing the spacers; a wafer bar tray for placing the laser device wafer bars; a work table for placing the thin treatment holder, spacer tray and wafer bar tray; a spacer absorption port; and a wafer bar absorption port. In addition, this unit comprises: independent absorption spaces behind the spacer absorption device and wafer bar absorption device; and an absorption collet with an absorption control means for individually depressurizing the independent absorption space at laser device wafer bar or spacer absorption and individually clearing the depressurized state at laser device wafer bar or spacer detachment. The spacer is formed in a way that it has an opening at a position facing the wafer bar absorption device of the absorption collet. COPYRIGHT: (C)2008,JPO&INPIT
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