| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of initializing a position measuring system with respect to a large number of degrees of freedom, even when accurate position is made not measurable initially as to the positions of a scanning head and the scale of an encoder. SOLUTION: The scale has an incremental track for measuring the relative position and the absolute track for measuring an absolute position, as to a moving object with the at least two degrees of freedom with respect to a measuring frame. The incremental track or the absolute track is evaluated by the first evaluation method, in an initialization step, to generate an evaluation result. The moving object is matched with respect to the measuring frame, based on the evaluation result, in a matching step. The absolute track is evaluated with a slight allowance errors as to the matching between the scanning head and the scale accompanied thereto, by the second evaluation method, in a detection step, and the accurate absolute position is calculated with respect to each degree of freedom. COPYRIGHT: (C)2008,JPO&INPIT
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