Nest for dicing, and method and apparatus for cutting tapeless substrate using the same

摘要

A nest to support a tapeless substrate (102) during a dicing process, the nest having a nest main body (502) with a first side for supporting the substrate (102) and including a grid arrangement defining at least one nest opening (504) with an area smaller than that of a die (140) to be diced from the substrate, the nest also having a vacuum retainer plate (520) having at least one vacuum pedestal (522) configured to project through the nest opening (504) to hold the die (140) during the dicing process. Also a method for dicing a tapeless substrate (102) using such a nest.