| 摘要 |
An angular velocity sensor is provided to prevent a plurality of tuning-fork vibrators from being delaminated from a supporting surface by reducing a stress applied to the supporting surface. An angular velocity sensor includes a plurality of tuning-fork vibrators(10a,10b) and a control circuit(42). Each of the tuning-fork vibrators has a base unit and a plurality of arm units extended from the base unit. The tuning-fork vibrators are mounted on a package(30) in a shape of cavity through a pair of supporting units(20a,20b). A difference between resonance frequencies in the tuning-fork vibrators is larger than 1% of an average of the resonance frequencies in the tuning-fork vibrators. The control circuit is mounted on the package to control the tuning-fork vibrators. The control circuit supplies a driving signal to the tuning-fork vibrators and receives a detection signal from the tuning-fork vibrators. The package is covered by a cap.
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