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发明名称
Micro-electro-mechanical device, in particular micro-actuator for hard-disk drive, and manufacturing process thereof
摘要
申请公布号
EP1375416(B1)
申请公布日期
2007.10.24
申请号
EP20020425407
申请日期
2002.06.20
申请人
STMICROELECTRONICS S.R.L.
发明人
MASTROMATTEO, UBALDO;MURARI, BRUNO;FERRARI, PAOLO;SASSOLINI, SIMONE
分类号
B81B3/00;B81C1/00
主分类号
B81B3/00
代理机构
代理人
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地址
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