| 摘要 |
A scanning beam device for forming scan images by two-dimensionally scanning charged particle beams from charged particle beam sources on a sample comprises a first step (S3) of determining signal intensity distributions of the signal intensities of the scan images formed by means of the charged particle beams, a second step (S4) of carrying out adjustment so that the profiles of the signal intensity distributions may be the same, and a third step of determining the signal intensity of each scan image when the profiles of the signal intensity distributions are made the same. Considering the profiles of the intensity distributions of scan images obtained from the measurement objective of a sample as the key point, the profiles of the intensity distributions of scan images obtained by means of charged particle beam sources are made to agree with one another, the variation of the signal intensities of the scan images is reduced without using any reference intensity.
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