APPARATUS OF PROCESSING GLASS SUBSTRATE

摘要

A substrate processing apparatus is provided to reduce a tact time required to manufacture one product by shortening the operating radius of an indexer robot. Plural processing modules are disposed in a U type in a processing unit(120) in which a substrate(S) moves from one end of the processing unit through the processing modules to the other end. A buffer(150) is installed between the one end and the other end. An indexer(130) has at least one load port(132) supporting a cassette(140) and an indexer robot(134) transferring the substrate between the buffer and the cassette. The buffer has a loading buffer connected to one end and an unloading buffer connected to the other end.