发明名称 RECORDING SYSTEM, RECORDING DEVICE, AND RECORDING CONTROL SIGNAL GENERATION DEVICE
摘要 <p>[PROBLEMS] To correct various errors which may be caused in each recording device and prevent distortion of a recording pattern. [MEANS FOR SOLVING PROBLEMS] A signal generation unit (30) of a formatter (100) inputs a deviation amount (d) inherent to each recording device (10) and recording data (RD) in a recording signal correction device (47). The recording signal correction device (47) correcting a beam unit (33) and rotation/feed drive units (37A, 37B) according to them and generates a beam deflection signal (Vbeamm) and a substrate speed signal (Vsubm). Thus, it is possible to perform correction in accordance with an error (mechanical error) based on an assembling dimension accuracy of each part which may be different in the respective recording devices (10) and each controller control accuracy.</p>
申请公布号 WO2007116741(A1) 申请公布日期 2007.10.18
申请号 WO2007JP56411 申请日期 2007.03.27
申请人 PIONEER CORPORATION;KASONO, OSAMU;HOSODA, YASUO 发明人 KASONO, OSAMU;HOSODA, YASUO
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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