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发明名称
SUBSTRATE CASSETTE
摘要
申请公布号
CA2644914(A1)
申请公布日期
2007.10.18
申请号
CA20072644914
申请日期
2007.04.04
申请人
E.I. DUPONT DE NEMOURS AND COMPANY
发明人
FUKAZU, ISAO;YUASA, ICHIRO;MARUYAMA, YUICHI;TOKI, TERUKAZU
分类号
B65G49/06;H01L21/67
主分类号
B65G49/06
代理机构
代理人
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