| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for manufacture wherein an organic EL element that has higher performance can be manufactured with reduced processes. SOLUTION: The device 80 manufacturing the organic EL element panel 500 includes a plurality of vacuum deposition rooms from 12 to 15 and from 22 to 25. At the outside of the vacuum deposition rooms from 12 to 15 and from 22 to 25, ellipsometers 70 for measuring thickness of the vacuum deposition material 56 are respectively installed. In the case the film thickness measured by the ellipsometer 70 of the vacuum deposition room 12 becomes to have a prescribed film thickness, a robot 11 for vacuum conveyance conveys a glass substrate 51 on which the vacuum deposition material 56 is vacuum-deposited to the vacuum deposition room 13 installed in the next stage. COPYRIGHT: (C)2008,JPO&INPIT
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