| 摘要 |
It is an object of the invention to promote a detection sensitivity by effectively utilizing an arranged fixed electrode. Inclinations in x-axis and y-axis directions of a mass are detected in a two-axis detecting circuit. The two-axis detecting circuit is constituted by fixed electrodes having both of an x-axis detecting circuit function and a y-axis detecting circuit function and also having functions for detecting displacements in an x-axis direction and a y-axis direction. The two-axis detecting circuit switches the x-axis detecting circuit function and the y-axis detecting circuit function by switching wirings in the circuit by way of a switching circuit. Switching of a wiring state of the two-axis detecting circuit is carried out at each constant period based on a timing of a specific clock signal. In this way, the fixed electrodes can be used in both of the two circuit functions, and therefore, components in respective axes directions of an angular velocity can be detected based on a total sum of electrode sensitivities of the fixed electrodes. Thereby, a detection sensitivity can be promoted without increasing a sensor size, or increasing electrodes for detection.
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