发明名称 NEGATIVE RADIATION-SENSITIVE DRY FILM, TRANSFER FILM WITH THE SAME AND METHOD FOR FORMING BUMP
摘要 <P>PROBLEM TO BE SOLVED: To provide a dry film which excels in resolution and pattern profile, hardly results in crack, deficiency, or the like of a pattern even against squeeze pressure of soldering paste during printing after exposure, development and curing, and excels in printability, while maintaining satisfactory flexibility, and to provide a transfer film with the dry film and a method for forming bumps using the dry film. <P>SOLUTION: The negative radiation-sensitive dry film comprises (A) a polymer having a carboxyl group and/or a phenolic hydroxyl group, (B) a crosslinking agent having two or more ethylenically unsaturated bonds, and (C) a radiation-sensitive radical polymerization initiator, wherein a crosslinking agent having a viscosity at 25&deg;C of <1,000 mPa s is used as the crosslinking agent (B). <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007272086(A) 申请公布日期 2007.10.18
申请号 JP20060099890 申请日期 2006.03.31
申请人 JSR CORP 发明人 YOKOYAMA KENICHI;SAKAI YOKO;OTA KATSU
分类号 G03F7/004;G03F7/033;G03F7/40;H01L21/60;H05K3/34 主分类号 G03F7/004
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