| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface property measuring device and a surface property measuring method, capable of performing measurement with a set fixed measurement force with respect to variations in the ambient temperature, and improving the accuracy, handleability, and reliability, as a result. <P>SOLUTION: The surface property measuring device includes a sensor 1 having a stylus, an excitation element 4, and a detection element 5; a drive actuator 11 for causing it to move relative to an object to be measured; an oscillator 34 for oscillating and outputting an excitation signal of a set frequency; a first variable amplifier 35 for correcting an amplitude of the excitation signal from the oscillator according to a set gain and providing it to the excitation element of the sensor; and a control means 31. The control means includes a frequency correction means for detecting the detection signal from the detection element and correcting the set frequency of the oscillator to a frequency with the maximum amplitude of the detection signal, and an excitation gain adjustment means for adjusting the set gain of the first variable amplifier 35, according to the difference between a new set frequency that has been newly set by the frequency correction means and old set frequency. <P>COPYRIGHT: (C)2008,JPO&INPIT |
