DYNAMIC METROLOGY SAMPLING FOR A DUAL DAMASCENE PROCESS

摘要

A method of monitoring a dual damascene procedure that includes calculating a pre-processing confidence map for a damascene process, the pre-processing confidence map including confidence data for a first set of dies on the wafer. An expanded pre-processing measurement recipe is established for the damascene process when one or more values in the pre¬ processing confidence map are not within confidence limits established for the damascene process. A reduced pre-processing measurement recipe for the first damascene process is established when one or more values in the pre¬ processing confidence map are within confidence limits established for the damascene process.