| 摘要 |
An electrochemical deposition method in which the structure of a substance to be deposited on the surface of a working electrode is determined, an electrochemical deposition apparatus, and a microstructure are provided. A positive electrode 1 and a negative electrode 2 functioning as a working electrode are arranged oppositely in a liquid tank 5 containing an electrolytic (acid) solution (hereinafter referred to as "solution") 4 in which plural substance are dissolved in an ionic state, and then a predetermined voltage is applied between the positive electrode 1 and the negative electrode 2. A reference electrode 3 is also arranged in the liquid tank 5 and the potential between the negative electrode 2 and the reference electrode 3 is measured. Since the solution 4 can be considered as a conductor, the potential V 1 of the negative electrode 2 relative to the solution 4 can be determined. Furthermore, a reaction inhibitor is admixed in the liquid tank 5, spontaneous electrochemical oscillation (current oscillation in this case) is generated in the electrochemical deposition reaction of the substances in the presence of the reaction inhibitor. The waveform of the electrochemical oscillation is controlled by regulating the potential V 1 of the negative electrode, the concentrations of the substances in the solution, and the kind and concentration of the reaction inhibitor, thereby the structure of a substance to be deposited on the surface of the working electrode is determined. |
