| 摘要 |
PROBLEM TO BE SOLVED: To provide a londitudinal boat which suppresses flaws called rod marks generated on the wafer backside and prevents particles from growing. SOLUTION: The boat has three or more wafer support rods disposed vertically in parallel to one another, and upper and lower support plates disposed at upper and lower ends for fixing them. The wafer support rod has a plurality of grooves perpendicular to its length axis, the groove form a wafer support arm tapered toward the wafer center and inclined upward with a horizontal half-circular wafer support face located at the top end of the wafer support arm, and there is a groove backside in the groove at an angle of 87°-93°with respect to the inclination of the arm. COPYRIGHT: (C)2008,JPO&INPIT |
