| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition method, or the like, of an organic thin-film layer of a polymer organic EL element which has high reliability since a dark spot is hard to occur due to ageing. SOLUTION: The deposition method of an organic thin-film layer of an organic EL element includes a process in which an organic thin-film solution containing a high molecular polymer and an organic solvent is coated in a shape of a solid membrane and the organic solvent is vaporized to obtain a deposition of an organic thin-film layer such as a light-emitting layer and a hole transfer layer or the like. Prior to deposition, an atmosphere to deposit the organic thin-film layer is adjusted to an atmosphere which has a low dew point and contains an organic steam, the organic thin-film layer is deposited in this atmosphere. A deposition device to achieve the deposition method in a simple structure is composed of a coater (51) to deposit an organic thin-film layer, a deposition box 71 housing the coater (51) inside, a dehumidifier 81 to adjust an inner space of the deposition box 71 to a low dew point atmosphere and an organic steam generating unit (91) to adjust the inner space of the deposition box 71 to an atmosphere containing organic steam. COPYRIGHT: (C)2008,JPO&INPIT
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