发明名称 IMAGE SENSOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor substrate is provided on which a plurality of shallow trench isolations (STI) defining a plurality of active areas are formed. The active areas comprise a photo sensing region, and a plurality of photodiodes are formed in each photo sensing region. Then a local oxidation of silicon isolation (LOCOS) layer is formed by performing a LOCOS process. Thereafter a plurality of gates are respectively formed in each active area, where the gates partially overlap the LOCOS layer. Finally doped regions are formed in the semiconductor substrate where the gate does not cover the LOCOS layer.
申请公布号 US2007243676(A1) 申请公布日期 2007.10.18
申请号 US20060379057 申请日期 2006.04.18
申请人 SZE JHY-JYI 发明人 SZE JHY-JYI
分类号 H01L21/8234 主分类号 H01L21/8234
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