| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique reducing increase in the resistance of an upper electrode, a damages on a membrane and the lowering of insulation resistance between the upper electrode and a lower electrode even when a stepped section is formed by dividing the lower electrode into each element. SOLUTION: An ultrasonic transducer has a plurality of the lower electrodes 203, an insulating film 204 coating the lower electrodes, a plurality of cavity sections 205 formed so as to be superposed to the lower electrodes 203 on the insulating films 204 and an insulating film 3401 burying sections among the cavity sections 205. The ultrasonic transducer further has the insulating film 206 coating the cavity sections 205 and the insulating film 3401, a plurality of the upper electrodes 207 formed so as to be superposed to the cavity sections 205 on the insulating film 206 and a plurality of wirings 208 connecting these upper electrodes 207. In the ultrasonic transducer, the surfaces of the cavity sections 205 and the insulating film 3401 are flattened at the same height. COPYRIGHT: (C)2008,JPO&INPIT |
