| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical semiconductor device capable of highly efficiently supplying heat output from a heater to an optical waveguide. SOLUTION: The optical semiconductor device includes an optical waveguide region (21) in which an optical waveguide layer (3) provided with a wavelength selecting means (2) is covered with a clad layer (5), a heater (9) provided on the optical waveguide region, an electrode, wirings (10b, 11b) formed by patterning and connecting the electrode to the heater, and a first lower thermal conductive region (20) provided on the lower part of the wirings and having thermal conductivity smaller than the thermal conductivity of the semiconductor layer. COPYRIGHT: (C)2008,JPO&INPIT
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