| 摘要 |
In the past there has been a problem that on a detection surface the influence of interference causes a defocusing signal to degrade, narrowing the range in which spherical aberration can be stably detected. Accordingly, a diffraction grating is used to focus the inner and outer sides of luminous flux on separate optical detectors before the optical flux is focused on an optical detector and defocusing signals are independently calculated to find the difference therebetween, thereby providing a spherical aberration signal. This makes it possible to detect spherical aberration signals more stably.
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