| 摘要 |
An inner-face grinder of a semiconductor gas tank is provided to restrain the generation of accidents by loading/unloading automatically the gas tank to/from a container using a tank loading unit. An inner-face grinder of a semiconductor gas tank includes a tank grinding unit and a tank loading unit. The tank grinding unit(100) is composed of a cabinet(110) with a body and a lid, a plurality of containers spaced apart from each other along a periphery of an inner portion of the cabinet, a driving member for polishing an inner-face of the gas tank by rotating the cabinets. The tank loading unit(200) is used for loading/unloading the gas tank to/from the container. The tank loading unit is composed of a base frame(210) spaced apart from the tank grinding unit, a moving block(220) capable of moving to and fro by using a guide member, a tank loading bar, an operation part. The tank loading bar(230) is connected to the moving block. The tank loading bar includes an adsorbing portion for adsorbing the gas tank using a magnetic force. The operation part is used for operating the tank loading bar.
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